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1967 Mikrowellen-Plasma Ionenquelle

Inhalt: Helium wird per Mikrowellen in Plasma versetzt und gibt per Photoionisation und Ladungstransfer die Ionizierung an ein Sample ab

The microwave ion source of the present invention concurrently employs the aforementioned photoionization effect and the so-called charge transfer effect to improve the efficiency of ionizing a sample gas.
The charge transfer effect is such a phenomenon that the atoms of a dis- 3,476,968 Patented Nov. 4, 1969 charge gas excited to a high energy state in the discharge plasma ionize a sample gas by impacting the molecules orvatoms of the sample gas, and, at the same time, the atoms of the discharge gas return to their ground state.
In the ion source of the present invention the atoms of the discharge gas and the ions of the sample gas in the plasma are separated to supply only the ions of the sample" gas.

von : Hitachi Ltd

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The reaction He*+M He+M+, where M+ represents the ion of the molecule (or atom) of the sample gas, is known as an ionization mechanism due to a charge transfer effect. In the present invention the ionization mechanism due to the charge transfer effect plays an important role. Therefore, it is a necessary condition of the present invention to introduce the molecules (or atoms) (M) of the sample gas to be ionized into or in the vicinity of the plasma 11 so that the molecules (M) directly collide with the excited helium atoms (He*).
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